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        2. 產品詳情
          • 產品名稱:微機械激光掃描鏡

          • 產品型號:Micromechanical scanning mirrors
          • 產品廠商:其它品牌
          • 產品文檔:
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          簡單介紹:
          此系列的微機械激光掃描鏡分為1D和2D產品,即根據其其掃描軸為單軸或雙軸而不同。此類微光機電光束掃描鏡也被稱為微掃描鏡或者微光機電光束偏轉器。
          詳情介紹:
          此系列的微機械激光掃描鏡分為1D和2D產品,即根據其其掃描軸為單軸或雙軸而不同。此類微光機電光束掃描鏡也被稱為微掃描鏡或者微光機電光束偏轉器。
          The mirror plate of the microscanner performs a continuous, harmonic oscillation. The oscillation is excited electrostatically and utilizes planar electrostatic comb drives. The oscillation-frequency has to be close to the natural frequency of the scanning axis. Adjusting the driving voltage or the driving frequency allows setting and controlling the
          oscillation amplitude. For 2D devices, the mirror plate is gimbal-mounted. The resonance frequency of each axis is determined by design independently. Each axis is excited individually. Thus, the ratio of the oscillation amplitudes and the phase difference can be set and controlled arbitrarily.

          Technical Properties
          Mirror Motion harmonic oscillation
          Scan Frequencies depending on configuration type and design parameters 100 Hz - 50 kHz
          Drive Signal A square wave voltage input signal is required which can be generated with standard laboratory equipment - a power supply unit is not in standard scope of delivery with VarioS®-microscanner-demonstrators. 1D- VarioS®-microscanner-demonstrators can be delivered with the Laser Deflection Cube as an option.
          Alternatively customer specific drive electronics and system designs can be delivered as result of a research and development project from Fraunhofer IPMS.
          Amplitude up to ±29° maximum mechanical deflection, amplitude controllable via electrode voltage and input pulse frequency
          Drive Mode electrostatic-resonant
          Drive planar comb electrodes with out-of plane motion
          2D Axis Configuration gimballed
          Position Sensors no position sensor integrated
          Mirror Shape circular
          Mirror Diameter / 1D-Microscanner 0.5 - 3 mm
          Mirror Diameter / 2D-Microscanner 0.5 - 2 mm
          Mirror Reflectance dependent on wavelength of light source, approx. 80-92% (see Fig. 1)for visible range
          Chip Dimensions 5370 µm x 4540 µm

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